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发明名称
MOVEMENT CONTROL FOR A METROLOGICAL INSTRUMENT
摘要
申请公布号
EP1181499(A1)
申请公布日期
2002.02.27
申请号
EP20000931427
申请日期
2000.05.26
申请人
TAYLOR HOBSON LIMITED
发明人
MILLS, MICHAEL
分类号
G01B21/20;G01B7/008;G01B7/28;G01B7/34;G01B21/04;G01B21/30;(IPC1-7):G01B7/008
主分类号
G01B21/20
代理机构
代理人
主权项
地址
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