| 摘要 |
<p>A gate valve (20) for a semiconductor processing system includes a base frame (28) configured movable along a guide (26) to move toward and away from a valve seat (22), which surrounds an opening portion (14). A first stopper (56) is disposed at the upper end of the guide (26), for defining the movement limit of the base frame (28) on the valve seat (22) side. A swing frame (34) is rotatably attached to the base frame (28), and has an upper end connected to a valve plug (24). The swing frame (34) is connected to the base frame (28) by a link mechanism (36), which can bend and stretch while flexing an intermediate portion, and by a spring and damper member (44). The intermediate portion of the link mechanism (36) has a mediation member (38) connected to a reciprocation rod (54) of an air actuator (52). <IMAGE> <IMAGE> <IMAGE></p> |
