| 摘要 |
PURPOSE: An inspection method and inspection apparatus are provided to reduce needle pressure applied by a probe to a measuring electrode. CONSTITUTION: An inspection apparatus(10) includes a power source circuit applying voltage to a part of an insulating film formed on an inspection electrode(P) of a target object(W) so as to form a predetermined potential gradient causing fritting phenomenon in the insulating film to break a part of the insulating film and formed in at least a part of the insulating film; inspecting probes(12A,12B) electrically contacting with a surface of a part of the inspection electrode, whose insulating film is broken by fritting phenomenon; and a tester(13) connected to the inspecting probes so as to inspect electrical properties of the target object to be inspected.
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