发明名称 METHOD AND APPARATUS FOR MANUFACTURING FLAT IMAGE DISPLAY DEVICE
摘要 <p>The manufacturing method of a flat panel display comprises facing a faceplate, which has a phosphor screen, to a rear plate, which has an electron emitting element, with a predetermined gap, and joining. At least one of a rear plate (20) and a faceplate (10) is accommodated in an electron beam cleaning chamber (42, 46), and, an electron beam (53) is irradiated onto the rear plate (20) or the faceplate (10) from an electron beam generator (52), which is disposed in the electron beam cleaning chamber (42, 46), in a vacuum atmosphere. Thereby, a surface adsorbed gas is sufficiently degassed. Thus, by sufficiently degassing the surface adsorbed gas in the display, the inside of a vacuum vessel as an envelope can be maintained in a high vacuum state. &lt;IMAGE&gt;</p>
申请公布号 EP1182682(A1) 申请公布日期 2002.02.27
申请号 EP20000917432 申请日期 2000.04.24
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ENOMOTO, TAKASHI;NISHIMURA, TAKASHI
分类号 H01J31/12;H01J9/39;(IPC1-7):H01J9/39 主分类号 H01J31/12
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