发明名称 |
SEAL-GAS VALVE DEVICE |
摘要 |
<p>During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply (3) has its pressure reduced by a pressure reducer (6). An on/off valve (7) controls a flow of the inert gas through a flow restriction (8) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet (4). After pumping the corrosive gas, a control valve (12) in a bypass line (11) causes the inert gas to be supplied to the outlet (4) at a higher flow rate for purging the pump.</p> |
申请公布号 |
EP1181483(A1) |
申请公布日期 |
2002.02.27 |
申请号 |
EP20000909088 |
申请日期 |
2000.01.20 |
申请人 |
LEYBOLD VAKUUM GMBH |
发明人 |
PALTEN, THOMAS;STOLLE, ROBERT;KALISCH, DIRK |
分类号 |
F17C13/00;F04D19/04;F04D27/00;F17D3/00;(IPC1-7):F17C13/04 |
主分类号 |
F17C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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