| 摘要 |
<p>A gas delivery system accurately measures and optionally regulates mass flow rate in real time. The system includes a fluid conduit connecting an inlet valve, calibration volume, flow restrictor, and outlet valve in series. Pressure and temperature sensors are coupled to the calibration volume. A differential pressure sensor, or pair of differential, absolute, or gauge pressure sensors, may be attached across the flow restrictor. Alternatively, an absolute pressure sensor may be attached upstream of the flow restrictor.</p> |
