发明名称 Power controlling unit and thermal processing unit
摘要 A power controlling unit of the invention includes a power transformer: having a primary side connected to an Alternating-Current power supply source; and a secondary side having an end side provided with a terminal connected to an end of an object whose power is to be controlled, and the other end side provided with a plurality of voltage taps. A switching part is disposed between the plurality of voltage taps and the other end of the object. The switching part selects one from the plurality of voltage taps in order to connect the one to the other end of the object. A storing part stores output values for the object and switching patterns which correspond to the output values respectively. Each of the output values is set correspondingly to a unit of control consisting of a plurality of cycles of the source. Each of the switching patterns defines a voltage tap that should be selected if any in each of the plurality of cycles in order to achieve the corresponding output value. A switching controlling part can read a switching pattern corresponding to an output value from the storing part and control the switching part based on the switching pattern.
申请公布号 US6351105(B2) 申请公布日期 2002.02.26
申请号 US20010817266 申请日期 2001.03.27
申请人 TOKYO ELECTRON LIMITED 发明人 SUZUKI FUJIO
分类号 H05B3/00;G05F1/14;G05F1/20;H01L21/31;H01L21/324;(IPC1-7):G05F1/14 主分类号 H05B3/00
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