发明名称 Method of fabrication of a no-field MOS transistor
摘要 Method of fabrication of a no-field transistor with no extra process costs, providing for defining an active area for the transistor surrounded by a thick field oxide layer, insulatively placing a polysilicon gate electrode across the active area to define source/drain regions of the no-field transistor, providing an implant protection mask over a boundary between at least one of the source/drain regions and the field oxide layer, selectively implanting in said source/drain regions a relatively heavy dose of dopants to form relatively heavily doped source/drain regions and to simultaneously dope the polysilicon gate electrode, the polysilicon gate electrode formed with lateral wings extending towards the at least one source/drain region, and the implant protection mask extending over the lateral wings but not over the polysilicon gate.
申请公布号 US6350637(B1) 申请公布日期 2002.02.26
申请号 US20000543400 申请日期 2000.04.05
申请人 STMICROELECTRONICS S.R.L. 发明人 MAURELLI ALFONSO;ZABBERONI PAOLA
分类号 H01L21/336;H01L29/08;H01L29/423;(IPC1-7):H01L21/336;H01L21/823 主分类号 H01L21/336
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