INK JET RECORDING HEAD, METHOD OF MAKING THE SAME AND INK JET RECORDER

摘要

PROBLEM TO BE SOLVED: To provide an ink jet recording head wherein the ink ejection property is improved and destruction of a diaphragm is prevented and to provide a method of making the same and an ink jet recorder. SOLUTION: This ink jet recording head that comprises a passage forming substrate on which a pressurizing chamber consisting of a monocrystalline silicon and communicating with a nozzle is to be formed and a piezoelectric element which is formed thereon at a region corresponding to the pressurizing chamber with a diaphragm forming a part of the pressurizing chamber therebetween by a thin film and a lithographic method. A passage forming layer is provided between the passage forming substrate and the diaphragm and an opening section is formed on the passage forming layer at a region corresponding to the pressurizing chamber. At least an end section of the pressurizing chamber in a longitudinal direction in a plane shape at the side of the passage forming layer is defined by the outer edge of the opening.