发明名称 Semiconductor device having ultra-sharp P-N junction and method of manufacturing the same
摘要 A semiconductor device such as a P-N or P-I-N junction diode, includes a first semiconductor layer having a first conductivity-type and being mounted over a metal address line, and a second semiconductor layer having a second conductivity-type and being mounted over the first semiconductor material. The diode preferably has a thickness of substantially no more than about 1 micron, and the diode includes a P-N junction confined to a thickness of less than about 0.1 micron. In the preferred embodiment the method comprises depositing a first semiconductor layer having a first conductivity type, depositing a second intrinsic layer, annealing to convert both layers to a polycrystalline layer, implanting ions of a second conductivity type into the second layer, and annealing to convert the second layer to a polycrystalline. The result is a diode having an ultra-sharp p-n junction.
申请公布号 US6351023(B1) 申请公布日期 2002.02.26
申请号 US20000689660 申请日期 2000.10.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 GATES STEPHEN MCCONNELL;SCHEUERLEIN ROY EDWIN
分类号 H01L21/329;H01L27/08;H01L29/861;H01L29/868;(IPC1-7):H01L29/06 主分类号 H01L21/329
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