| 摘要 |
A quick set of procedures for diagnosing the cause of a failure in a vacuum system having a pump and a chamber is disclosed. If the base pressure of the system has failed, but the rate of rise has not, then the most likely cause of the failure may be in the pump. If the rate of rise has failed, but the base pressure has not, then the most likely cause of the failure may be in the chamber. If the base pressure and rate of rise have both failed, then the most likely cause of the failure is in the chamber, but there is a slight chance of a failure in the pump. Measurements of the partial pressures of certain residual gases in the system may indicate a leak in the system. Measurements of the partial pressures of certain residual gases while turning off and on the lamps in the system may indicate a leak in the lamps. Measurements of the partial pressure of helium or other relevant gas, while moving a source of helium around the outside surface of the system, may determine the location of a leak.
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