DEVICE FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a device for treating a substrate with which the wearing of support pins and the crushing of a substrate can be prevented. SOLUTION: There are provided a substrate supporting base 1 which supports the substrate W and which is a disk-shaped plate rotated horizontally by a rotation means, pillar-shaped supports 14 supporting the substrate W by means of point contacts with the reverse faces of a plurality of substrates W arranged on the above supporting base 1, adsorbing bodies 15 which adsorb to support the outer edges of the substrates W supported on the above supporting base 1 by the supports 14, and supply units 5, 6, 9 of a treating liquid which supply the treating liquid to the upper surface and/or the lower surface of the substrate W supported on the above supporting base 1.