| 摘要 |
A halogen generator which uses a material which absorbs commercially availab le halogen and, on being heated, releases the halogen in a very pure form, i.e. > 99.7 %. Such a generator can be u sed in a gas management system for an excimer laser in which the laser gas contains a halogen donor, an active rare gas and an iner t gas diluent. Cleaners are provided to enable the rem- oval from the laser gas mixture of contaminants which build up in operation of the laser and the halogen gas generator is pro- vided to replace halogen lost in the contaminants and elsewhere. The generat or can be operated even when the laser is in opera- tion so that a desired partial pressure of the halogen can be maintained.</S DOAB>
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