| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning sheet for a substrate treatment apparatus to be shielded from the contamination such as a production apparatus and an inspection device such as a semiconductor, a flat panel display and a printed board, and a method for cleaning the apparatus. SOLUTION: A cleaning sheet in which the Vickers hardness of its cleaning layer is at least 10, a cleaning sheet in which the surface free energy of its cleaning layer is at least 20 mJ/m2, a cleaning sheet in which an adhesive layer is formed on one side of its cleaning layer, a cleaning sheet in which a cleaning layer at least 10 in Vickers hardness is formed at least on one side of its support, and a cleaning sheet in which an adhesive layer is formed on the other side are provided.
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