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发明名称
摘要
申请公布号
JP3260946(B2)
申请公布日期
2002.02.25
申请号
JP19930347571
申请日期
1993.12.24
申请人
发明人
分类号
H01L21/302;H01J37/32;H01L21/3065;H05H1/48;(IPC1-7):H01L21/306
主分类号
H01L21/302
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