| 摘要 |
PURPOSE: A method is provided which vertically crystallizes a carbon nanotube on a substrate without catalyst so as to solve existing problems such as negative affects of transition metals used as catalytic metals on properties of the carbon nanotube and restriction of the transition metals on the utilization of vertical grown carbon nanotubes. CONSTITUTION: In synthesizing a carbon nanotube(20) in HF CVD (hot-filament chemical vapor deposition, the method for vertically crystallizing the carbon nanotube on a substrate(21) comprises the process of infusing hydrocarbon and hydrogen into a chamber and applying a bias to the substrate(21) without catalyst in a substrate temperature capable of synthesizing the carbon nanotube(20), wherein diamond powder having a diameter of 0.1 micron or less on the substrate is ultrasonic treated using alcohol suspension, the bias voltage is a negative bias voltage in the range of -250 to -350 V, a flow rate ratio of the hydrocarbon to the hydrogen is in the range of 1 to 5%, the substrate temperature is in the range of 850 to 1100 deg.C, and a carbon nanotube doped with nitrogen is vertically grown on the substrate by adding ammonia besides the hydrocarbon and hydrogen to the chamber.
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