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发明名称
摘要
申请公布号
JP3259227(B2)
申请公布日期
2002.02.25
申请号
JP20000218485
申请日期
2000.07.19
申请人
发明人
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
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代理人
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地址
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