发明名称 Close coupled match structure for rf drive electrode
摘要 An electrode assembly for supplying RF power from a RF power source having an output impedance to an electrically non-linear medium, the assembly being composed of: a drive electrode in communication with the medium and forming with the medium a load impedance; and an impedance match network coupled between the RF power source and the drive electrode for matching the output impedance of the RF source to the load impedance. The match network has an output component that is directly connected to the drive electrode. The electrode assembly can further have a body of RF energy absorbing material disposed between the match network and the drive electrode, the absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.
申请公布号 AU7919901(A) 申请公布日期 2002.02.25
申请号 AU20010079199 申请日期 2001.08.07
申请人 TOKYO ELECTRON LIMITED 发明人 THOMAS H. WINDHORN
分类号 H05H1/46;B01J19/08;C23C16/505;H01J37/32;H01L21/3065;H01L21/31 主分类号 H05H1/46
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