| 摘要 |
PURPOSE: Apparatus and method for coating a diamond-like carbon film are provided which increase an adhesive force of the diamond-like carbon film by inserting a tungsten layer and a mixture layer of tungsten and carbon between a substrate and the diamond-like carbon film as adhesive force increasing layers. CONSTITUTION: In an apparatus for coating a diamond-like carbon film on a substrate(1), the apparatus comprises a vacuum chamber(20) in which the substrate is arranged; a vacuum means maintaining the inside of the vacuum chamber as the vacuum state suitable for coating; a means(50) laying up a first adhesive force increasing layer consisting of certain elements on the substrate; and a means(50) laying up the diamond-like carbon film on the first adhesive force increasing layer, wherein the apparatus further comprises a means for laying up a second adhesive force increasing layer consisting of a mixture of the elements composing the first adhesive force increasing layer and hydrocarbon on the first adhesive force increasing layer, wherein the certain elements are one or more elements selected from the group consisting of W, Mo, Pd and Ta included in Group IV to Group VI in the periodic table, the hydrocarbon is methane (CH4), the means laying up a first adhesive force increasing layer lays up the first adhesive force increasing layer by sputtering using an argon gas a sputtering gas, the means for laying up a second adhesive force increasing layer lays up the second adhesive force increasing layer by sputtering using a mixed gas of argon and hydrocarbon as a sputtering gas, and wherein the hydrocarbon gas has a content of 10 to 60%.
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