| 摘要 |
PROBLEM TO BE SOLVED: To upgrade high repeating characteristics of a discharge stimulation laser system by accelerating the operation of a switching element without increasing in size and reducing unevenness of an operating time. SOLUTION: In a drive substrate 1 used for a high voltage pulse generator circuit of a discharge stimulation gas laser system, a switching signal to be transmitted via an optical fiber 5 is photodetected by a photodetector L/E. The photodetector L/E generates an output signal of 5 V, and turns on a second switching element SW2. Thus, a third switching element SW3 connected to a secondary side of a transformer T is turned on, and a first switching element S1 (IGBT) is turned on. A plurality of the first elements SW1 are connected in series. When the first elements SW1 are turned on, a high voltage pulse is generated from the high voltage pulse generator including a magnetic compression circuit.
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