| 摘要 |
PROBLEM TO BE SOLVED: To obtain a longitudinal diffusion device and its control system for predicting the arrival of a washing period by constantly displaying the number of use of a dummy wafer and a port on a monitor screen in real time, displaying washing operation items simultaneously with the washing period, and eliminating the need for controlling the washing period by human work. SOLUTION: The longitudinal diffusion device 1 consists of a longitudinal diffusion reactor 2 having a buzzer 44 for detecting a wafer to be treated that has been treated already, a control device 3 having a computer, a memory, and a reset switch, a display device 4 having a dummy wafer-washing lamp 42, a boat washing lamp 43, a buzzer 44, the memory, and a counter display device 41, and a start switch 5 having a lamp 5A and an end switch 6 with a lamp 6A connected to the control device 3.
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