ADJUSTMENT SYSTEM OF PROJECTION ALIGNER, ALIGNING DEVICE, ADJUSTMENT METHOD OF PROJECTION ALIGNER, ALIGNING METHOD, INFORMATION-PROCESSING DEVICE, AND PROJECTION ALIGNER, DEVICE-MANUFACTURING METHOD USING THEM, ADJUSTMENT INFORMATION SUPPLY METHOD

摘要

PROBLEM TO BE SOLVED: To provide the adjustment system of a projection aligner that functions as an offset analyzer, and at the same time cancels increase in device cost. SOLUTION: The relative alignment between the first and second objects is made by the offset analyzer 10 before the shape of a plurality of marks on the second object is measured, a mark detection signal and shape information are sent from a host computer 12 to a vender 11 via the Internet, indication that a device variable is changed by the vender 11 as needed and the mark is detected with optimized conditions communicates via the Internet, the mark detection signal and shape information are sent to the vender 11, an offset generated by the simulation by the vender 11 is calculated, information containing the offset is transferred to a stepper 14 via the Internet, the alignment between the first and second objects is carried out based on the information containing the offset, and exposure is made by a stepper 14.