METHOD FOR MANUFACTURING THIN FILM MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic recording medium, in which surface particles are easily removed without damaging a protection layer after the protection layer is deposited so that a magnetic head can be made to float stably and an error can hardly be produced by signal missing when recording/reproducing is carried out. SOLUTION: This method for manufacturing the thin film magnetic recording medium comprises a film depositing step to successively form at least a magnetic recording layer and the protection layer on a nonmagnetic substrate by a dry process, a lubricating layer forming step to form a lubricating layer on the protection layer and a plasma etching step to subject the surface of the protection layer to plasma etching treatment between the film depositing step and the lubricating layer forming step. The film depositing step and the plasma etching step are carried out continuously in vacuum.