发明名称 |
SEMICONDUCTOR CAPABLE OF DECREASING JUNCTION LEAKAGE CURRENT AND NARROW WIDTH EFFECT AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A semiconductor capable of decreasing a junction leakage current and a narrow width effect is provided to decrease an electric field caused by a voltage applied to a junction region of a cell transistor while maintaining a high threshold voltage of a field transistor to separate unit cells from each other by forming a channel stop impurity region only under an isolation region and making the channel stop impurity region not formed under the junction region. CONSTITUTION: An active region and an isolation region having a trench are defined in a semiconductor substrate(21). A spacer(31a) is formed on both sidewalls of the trench. The channel stop impurity region(33a) is locally formed only on the bottom of the isolation region, self-aligned with the spacer. An isolation layer(35) is filled in the trench. A gate pattern(37) is formed on the isolation layer and the active region.
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申请公布号 |
KR100327348(B1) |
申请公布日期 |
2002.02.22 |
申请号 |
KR20000043009 |
申请日期 |
2000.07.26 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JAE KYU |
分类号 |
H01L21/76;H01L21/265;H01L21/762;H01L27/08;H01L29/10;(IPC1-7):H01L21/265 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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