发明名称 SEMICONDUCTOR CAPABLE OF DECREASING JUNCTION LEAKAGE CURRENT AND NARROW WIDTH EFFECT AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A semiconductor capable of decreasing a junction leakage current and a narrow width effect is provided to decrease an electric field caused by a voltage applied to a junction region of a cell transistor while maintaining a high threshold voltage of a field transistor to separate unit cells from each other by forming a channel stop impurity region only under an isolation region and making the channel stop impurity region not formed under the junction region. CONSTITUTION: An active region and an isolation region having a trench are defined in a semiconductor substrate(21). A spacer(31a) is formed on both sidewalls of the trench. The channel stop impurity region(33a) is locally formed only on the bottom of the isolation region, self-aligned with the spacer. An isolation layer(35) is filled in the trench. A gate pattern(37) is formed on the isolation layer and the active region.
申请公布号 KR100327348(B1) 申请公布日期 2002.02.22
申请号 KR20000043009 申请日期 2000.07.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JAE KYU
分类号 H01L21/76;H01L21/265;H01L21/762;H01L27/08;H01L29/10;(IPC1-7):H01L21/265 主分类号 H01L21/76
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