发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To eliminate increase in junction capacitance and disadvantages in microminiaturization by having a high concentration impurity layer interposed between two gates in a MOSFET. SOLUTION: An interval between the two gates 6 is made narrower; sidewalls 8 are connected between the gates 6; and an insulating film (NSG) 8 is interposed, so that a high concentration impurity layer (n+-type) is formed on a substrate (P-type well) 2 between the gates 6.
申请公布号 JP2002057221(A) 申请公布日期 2002.02.22
申请号 JP20010190605 申请日期 2001.06.25
申请人 OKI ELECTRIC IND CO LTD 发明人 SHINOHARA HIROBUMI;SUZUKI KAZUYA
分类号 H01L21/336;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L21/336
代理机构 代理人
主权项
地址