| 摘要 |
PROBLEM TO BE SOLVED: To provide a coil which can be increased in inductance and prevented from separating from a board even if a magnetic thin film is increased in film thickness. SOLUTION: A polyimide resin film 3 is formed on a glass or ceramic board 2, and a Co magnetic thin film 5 is laminated on the polyimide resin film 3 for the formation of a lower magnetic layer 1. A coil is equipped with the lower magnetic layer 1, an upper magnetic layer 30 having the same structure with the lower magnetic layer 1, and a coil layer 10 composed of an insulating polyimide film 11 and a conductor layer formed on the film 11 through the intermediary of an insulating layer. The coil layer 10 is sandwiched in between the magnetic layers 1 and 30. The lower magnetic layer 1, the coil layer 10, and the upper magnetic layer 30 are laminated into a laminate of integral structure, making the boards 2 and 32 of the magnetic layers 1 and 30 serve as outermost layers respectively.
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