| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage which can be used even in the vacuum while reducing the size and enhancing the controllability. SOLUTION: The stage comprises two guide members 13, 14 extending in the direction of Y-axis, and sliders 23, 24 being guided for the guide members 13, 14, respectively, through a noncontact air bearing. A moving guide 25 extends in the direction of X-axis across the two guide members 13, 14 and a slider 27 is provided to be guided for the moving guide 25 through a noncontact air bearing. The slider is provided with a drive mechanism comprising a linear motor, and an air cylinder combined with the noncontact air bearing to assist driving power at the time of acceleration or deceleration.</p> |
