FLAME HYDROLYSIS DEPOSITION PROCESS FOR MAKING INTEGRATED OPTICAL COMPONENTS

摘要

A method for depositing a presintered glass layer (20) rather than fine soot particles on a substrate for use in an integrated optical component. Varying the ratio of the fuel mixture components or fuel rate of the burner (26) (or both) provides control over the microuniformity of the deposited glass layer (20) upon the substrate (22). The presintered glass layer (20) provides a planar optical waveguide with better compositional microuniformity and surface roughness values.