| 摘要 |
Disclosed is a substrate conveying system for conveying a substrate to and from an accommodating container, wherein a fork-like hand arranged to hold a reticle by attraction is relatively moved close to or away from and upwardly or downwardly, relative to the container. The container has a supporting member for supporting one or more reticles and a positioning member for positioning the same in a horizontal plane. The conveying system has an obstacle detector, comprising a transmission type sensor, for detecting presence/absence of any obstacle in a region through which the hand is inserted to transfer a reticle. This structure avoids interference between the hand and the container or the reticle.
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