发明名称 CAM REFERENCE FOR INSPECTION OF MULTI-COLOR AND CONTOUR IMAGES
摘要 This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.
申请公布号 WO0148465(A3) 申请公布日期 2002.02.21
申请号 WO2000IL00855 申请日期 2000.12.22
申请人 ORBOTECH LTD.;GUTMAN, ZEEV;GILAT-BERNSHTEIN, TALLY 发明人 GUTMAN, ZEEV;GILAT-BERNSHTEIN, TALLY
分类号 G01N21/956;G01R31/311;G06T7/00 主分类号 G01N21/956
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