发明名称 |
ROHLING FÜR BELICHTUNGSMASKE |
摘要 |
Transmissive attenuated embedded phase shifter photomasks comprising at least one polymeric material, preferably an amorphous fluoropolymer or an amorphous fluoropolymer doped with a fluorine functionalized organosilane, and organosilicates, or combinations thereof, the polymeric material having: (a) an index of refraction (n) in a range from 1.2 to 2.0, preferably in the range from 1.26 to 1.8, at a selected lithographic wavelength below 400 nm; and (b) an extinction coefficient (k) in a range from 0.04 to 0.8, preferably in the range from 0.06 to 0.59 at the selected lithographic wavelength below 400 nm. |
申请公布号 |
DE69709738(D1) |
申请公布日期 |
2002.02.21 |
申请号 |
DE1997609738 |
申请日期 |
1997.06.30 |
申请人 |
E.I.DU PONT DE NEMOURS AND COMPANY, WILMINGTON |
发明人 |
FRENCH, HARQUAIL;SHARP, GEORGE |
分类号 |
G03F1/00;G03F1/32;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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