METHOD FOR WAFER POSITION DATA RETRIEVAL IN SEMICONDUCTOR WAFER MANUFACTURING

摘要

Described is a method for processing products, especially semiconductor wafers, whereby a sequence of orders (PS) is defined to produce the products arranged in a container. Product processing data of product processing steps (POn, POff) are stored with reference to product position data identifying product positions in the product containers. When the position of products in a container is required, a product handling order (MO) is defined and integrated in the predefined sequence of orders thereby resulting in an extended sequence of orders. The product processing steps and the product handling step are executed in compliance with the extended sequence of orders and product position change data are stored. Thereby all slot related semiconductor processing information are automatically brought in conformity with the actual material flow in cases that handling steps changing the semiconductor positions are performed upon irregular processing execution.