METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENTS

摘要

A method of producing a quality organic EL element deposited film with good productivity by uniformly and quickly heating a container loaded with a vapor deposition material by electromagnetic induction heating. A device used for organic EL thin film vapor deposition obtained by vaporizing an organic material (5) for organic EL elements in a container (2) to allow vapor deposition on a film forming substrate (6) to form a thin film, the organic EL element vapor deposition device comprising the container (2) made of a material which heats up by electromagnetic induction, and a means for heating, by electromagnetic induction, the container used for evaporating the organic material (5). A method of producing organic EL elements using this device. Together with or in place of the container (2) made of a material which heats up by electromagnetic induction, a filler made of a material which heats up by electromagnetic induction may be put in the container (2).