发明名称 RELAY IMAGE OPTICAL SYSTEM, AND ILLUMINATING OPTICAL DEVICE AND EXPOSURE SYSTEM PROVIDED WITH THE OPTICAL SYSTEM
摘要 <p>A relay image optical system which is reduced in size and weight with fewer lenses and without compromise in required optical characteristics, which forms an image on a first plane (10) onto a second plane (M), and which comprises, in the order mentioned from the first plane side, a first lens group (G1), a second lens group (G2) and a third lens group (G3) so configured as to position image planes at finite distances. At least two lens groups out of first through third lens groups (G1-G3) respectively have at least one aspherical surface, a total number of lenses constituting the optical system being up to 10.</p>
申请公布号 WO2002014924(P1) 申请公布日期 2002.02.21
申请号 JP2001006913 申请日期 2001.08.10
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