MULTI-GAS DELIVERY SYSTEM

摘要

A system for regulating and monitoring the delivery of a flow of a gas from a gas source (22) to an output flow (38) of a gas delivery device, wherein the gas is comprised of at least one specialty gas and preferably greater than one specialty gas. The system comprises a delivery unit (28) and a sampling unit (30). The delivery unit (28) is connectable with the gas source (22) and the output flow (38) of the gas delivery device (40) for delivering the flow of the gas from the gas source (22) to the output flow (38) at an injection site (36) defined thereby, wherein the delivery unit (28) is comprised of an adjustable device (34) for regulating the flow of the gas therethrough. The sampling unit (30) is connectable with the output flow (38) of the gas delivery device (40) at a location downstream of the injection site (36) for removing a gas sample from the output flow (38), wherein the sampling unit (0) is comprised of a sample monitoring device (48) for providing feedback on the composition of the gas sample. Preferably, the feedback is provided on a continuous basis.