| 摘要 |
<p>PURPOSE: To provide a method for efficiently and inexpensively producing the piezoelectric element of satisfactory and stable electric characteristics, with which an electrode is hardly corroded in dicing, without necessity to form a protecting film before dicing. CONSTITUTION: In this production method for a piezoelectric element, when cooling and dicing a wafer 1, with which an electrode 3 composed of Al alloy is formed on a piezoelectric substrate 2 composed of piezoelectric materials, formed by using a halogen containing gas by cooling water, cooling water containing a compound for forming anticorrosion coating on the surface of the electrode composed of Al alloy by reacting with Al is used as cooling water.</p> |
