| 摘要 |
<p>A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure (501) as part of a real-time optical measurement process. The interpolated optical response (602) is a continuous and (in a preferred embodiment) (801) smooth function of measurement parameters (X), and it matches the theoretically-calculated optical response at the database-stored interpolation points (701, 702).</p> |
