Device for transporting elements to be processed through high temperature zone has elongated bearer elements of flexible material held under tension along their longitudinal axes

摘要

The device has at least one pair of parallel bearer elements extending in the transport direction and at least one drive mechanism producing a repetitive lift and feed movement on a closed curved path so the bearer elements move in the transport direction on the upper half of the path and return to an initial position on a lower half. The elongated bearer elements consist of a flexible material held under tension along their longitudinal axes. The device has at least one pair of bearer elements (5a,5b;6a,6b) extending parallel to each other in the transport direction and at least one drive mechanism for them producing a repetitive lift and feed movement on a closed curved path (7) so the bearer elements perform a movement in the transport direction on the upper half of the path and return to an initial position on a lower half. The elongated bearer elements consist of a flexible material held under tension along the longitudinal axes of the bearer elements. Independent claims are also included for the following: a method of transporting elements to be processed, especially substrates or wafers, through high temperature zone.