发明名称 Abnormality-cause identifying apparatus and method
摘要 Disclosed is an abnormality-cause identifying apparatus including: a retrieving unit for retrieving quality data conforming to retrieving conditions; and a computing unit for computing mean values and standard deviations of the retrieved quality data, the computing unit further computing the likelihood of abnormality of each of manufacturing apparatuses, on the basis of the mean values and the standard deviations.
申请公布号 US2002022937(A1) 申请公布日期 2002.02.21
申请号 US20010759447 申请日期 2001.01.16
申请人 FUNAKOSHI HARUO 发明人 FUNAKOSHI HARUO
分类号 G01N37/00;G05B19/418;G05B23/02;G06F19/00;H01L21/02;H01L21/66;(IPC1-7):G06F19/00 主分类号 G01N37/00
代理机构 代理人
主权项
地址