发明名称 |
Microprobe and scanning type probe apparatus using thereof |
摘要 |
The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.
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申请公布号 |
US2002020805(A1) |
申请公布日期 |
2002.02.21 |
申请号 |
US20010803862 |
申请日期 |
2001.03.12 |
申请人 |
SHIMIZU NOBUHIRO;TAKAHASHI HIROSHI;SHIRAKAWABE YOSHIHARU;BRUGGER JURGEN P.;HABERLE WALTER;BINNIG GERD K.;VETTIGER PETER |
发明人 |
SHIMIZU NOBUHIRO;TAKAHASHI HIROSHI;SHIRAKAWABE YOSHIHARU;BRUGGER JURGEN P.;HABERLE WALTER;BINNIG GERD K.;VETTIGER PETER |
分类号 |
G01B7/34;G01B21/30;G01Q20/04;G01Q60/38;G01Q70/10;(IPC1-7):H01J3/14 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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