| 摘要 |
To provide a temperature adjustment apparatus that can reduce the amount of evaporation of a medium without using a closed type container. A temperature adjustment apparatus 24 is composed of a container 26 that contains PFC 42 for heat exchange, a circulation path 28 of the PFC 42 that passes through an electrode 20 of a plasma processing apparatus 10, and a pump 30. A liquid layer 40 that separates from the PFC 42 is formed in an upper layer of the PFC 42 that is contained in the container 26. As a result, the PFC 42 does not directly contact the atmosphere and therefore the amount of evaporation of the PFC 42 into the atmosphere is substantially reduced.
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