| 发明名称 |
Technique for determining curvatures of embedded line features on substrates |
| 摘要 |
Methods and systems for evaluating curvatures in line features embedded in a different material layer formed on substrates.
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| 申请公布号 |
US2002021452(A1) |
申请公布日期 |
2002.02.21 |
| 申请号 |
US20010843612 |
申请日期 |
2001.04.25 |
| 申请人 |
SURESH SUBRA;PARK TAE-SOON |
发明人 |
SURESH SUBRA;PARK TAE-SOON |
| 分类号 |
H01L21/66;H01L21/02;H01L21/3205;H01L23/544;(IPC1-7):G01B9/02 |
主分类号 |
H01L21/66 |
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