Mikromechanisches Bauelement

摘要

The invention relates to a micromechanical component, comprising a substrate and a movable structure (2) which is located on the surface of said substrate. Said movable structure (2) can be moved parallel to the surface of the substrate (1). The movable structure (2) is surrounded by a frame (3) on which a cap-type cover (4) is fixed. Said cover (4) has a stop (6) in the area of the movable element (2), this stop limiting the movement of the movable element (2) in a direction that is perpendicular to the surface of the substrate (1).