| 摘要 |
Disclosed is a microelectromechanical sensor (10) with an element (40) that is driven into oscillations with drive forms (phi1, phi2, phi3, phi4) through the use of arms (50), comb-drives (55A, 55B, 55C, and 55D) and corresponding comb-fingers (51, 61) and wherein a sense signal is transduced with capacitive sense electrodes (26, 26). The driveforms (phi1, phi2, phi3, phi4) are provided in four-phases and are applied in pairs (phi1, phi3 and phi2, phi4) that are 180 degrees out of phase with respect to one another such that the driveforms are substantially self-canceling with regard to any driveform energy that feeds through any parasitic capacitance (99) that connects the comb-drives (55A, 55B, 55C, and 55D) to the capacitive sense electrodes (26, 26).
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