发明名称 ABRASIVE PAD FOR CMP
摘要 An abrasive pad for CMP has a substrate (12) and an abrasive layer disposed on the substrate. An abrasive pad for CMP having a substrate and an abrasive layer disposed on the substrate, wherein said abrasive layer has a three-dimensional structure including a plurality of regularly arranged three-dimensional elements (II) having a predetermined shape, and said abrasive layer comprises an abrasive composite containing advanced alumina abrasive grains produced by a CVD method and a binder as construction components.
申请公布号 WO0214018(A2) 申请公布日期 2002.02.21
申请号 WO2001US25006 申请日期 2001.08.09
申请人 3M INNOVATIVE PROPERTIES COMPANY;AMANO, TAKASHI;WATASE, TOSHIHIKO;IMAMURA, KENGO 发明人 AMANO, TAKASHI;WATASE, TOSHIHIKO;IMAMURA, KENGO
分类号 B24B37/20;B24B37/22;B24B37/24;B24D3/00;B24D3/28;B24D13/14;C08J5/14;C08K7/00;C08L101/00;C09K3/14;H01L21/304 主分类号 B24B37/20
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