Production of a substrate having a transparent, conductive coating of metal layers and oxide layers comprises depositing a metal layer with the addition of oxygen in the coating chamber

摘要

Production of a substrate (10) having a transparent, conductive coating (20) of n metal layers (23, 25) (n = integer /- 1 ) and (n + 1) oxide layers (22, 24) in a coating chamber comprises alternately depositing an oxide layer and a metal layer on the side of the substrate, finishing with an upper oxide layer (26). At least one of the metal layers is deposited with the addition of oxygen in the coating chamber. Preferred Features: At least one metal layer is deposited in a gas atmosphere containing 0.01-10%, preferably 0.1-5%, especially 0.5-2% oxygen.