RESONATOR

摘要

PURPOSE: A resonator is provided, which can reduce a size of a resonant structure corresponding to a resonant frequency. CONSTITUTION: The resonator has a bottom substrate(31) where a right-angled hexahedral groove(32) is formed and a top substrate(36) forming a cavity(33) by being combined with the bottom substrate. The right-angled hexahedral groove is formed on a semiconductor wafer like Si, GaAs and InP, and an inner wall of the groove is covered with an epilayer(34) which can exclude air between the bottom substrate and a dielectric(50) filling the groove. The epilayer is a conductive material film, for example, a metal. A waveguide strip line(37) is formed on an upper part of the top substrate, and a slot(38) is formed on a conductive thin film(39). The conductive thin film of the top substrate forms the cavity by being combined with the strip line. The inside of the cavity is filled with the dielectric, and the strip line and the conductive thin film are combined with a pole(40).