THERMAL TYPE INFRARED RAY DETECTING ELEMENT, INFRARED RAY IMAGE PICKUP DEVICE HAVING THIS AND METHOD OF MANUFACTURING THERMAL TYPE INFRARED. RAY DETECTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain high detecting sensitivity by stably improving infrared ray absorptivity in a specific wave length band or a wide wave length band in a thermal type infrared ray detecting element. SOLUTION: In this thermal type infrared ray detecting element having an infrared ray refracting film thermally changed by energy of an incident infrared ray, the infrared ray absorptivity and the detecting sensitivity in the specific wave length band and the wide wave length band are enhanced by forming the infrared ray refracting film of a semiconductor film or a film having a level difference in an infrared ray spectrum having the wave length near 10μm.