发明名称 |
Micro-actuator and manufacturing method thereof |
摘要 |
<p>A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers. <IMAGE></p> |
申请公布号 |
EP1180493(A2) |
申请公布日期 |
2002.02.20 |
申请号 |
EP20010305088 |
申请日期 |
2001.06.12 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JIN-HO;KO, YOUNG-CHUL;KONG, DO-HYUN |
分类号 |
B81B3/00;B81C1/00;B81C3/00;H02N1/00;(IPC1-7):B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|