| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that the surface potential and surface shape of a sample cannot be stably measured regardless of the fluctuation of resonance frequency of a spring. SOLUTION: This surface electrometer and shape measuring instrument is provided with means 29 and 30 for applying, to a conductive probe 27, a voltage obtained by superposing a first AC voltage having either one of the primary and higher resonance frequency of the spring 26 or a frequency substantially equal to this resonance frequency with a second AC voltage having a 1/2 frequency of either one of the primary and higher resonance frequency of the spring 26 or the frequency substantially equal to this resonance frequency; a means 37 for measuring the potential of a measuring matter 28 from the amplitude of the first vibration of the spring 26 caused by the electrostatic attraction between the conductive probe 27 and the measuring matter 28 by the first AC voltage; and a means 38 for measuring the shape of the measuring matter 28 from the amplitude of the second vibration of the spring 26 caused by the electrostatic attraction between the conductive probe 27 and the measuring matter 28 by the second AC voltage.
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